FAKIR

The FAKIR system serves for rapid measurement of the distribution of the sheet resistance of conductive layers of wafers with a size of up 6" (150x150 mm). It operates by the four-point probe method; however, not with one sensor head, like conventional equipment, but with more than a hundred. The arrangement of the sensor heads can be chosen as desired. The FAKIR system is up to ten times faster than conventional systems. This gain in speed due to its design principle increases with the numberof sensor heads that can be brought into contact with the surface to be measured.

Technical Specification

• Max no. measurement points: 128
• Max. wafer size: 150 mm (rectangular and circular)
  
• Needle force: 0.4-1.3 N per needle adjustable
  
• Measurement range: 100 m/sq. to 120 M/sq.
  
• Other needle arrangements possible